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APPLICATION GUIDE APPLICATION DATA BASE SENSOR CATALOG DOWNLOAD
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AVS 56th International Symposium & Exhibition, San Jose Convention Center, San Jose, California, USA, November 8 - 13, 2009
 
PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Photovoltaics Plasma Process Sensor
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Uniformity Improvement
REFERENCES
Tool and Process
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2009 © Plasmetrex GmbH

PLASMA  METROLOGY and PROCESS SERVICES

Plasma Metrology

Plasma and RF Technology School
Hercules C500/1000
  • In-situ Plasma Metrology System Hercules® for etch and CVD processes (for semiconductor manufacturing and photovoltaic)
  • Routine manufacturing control and quality control
  • FDC and Conditioning (seasoning) control

Plasma School

Plasma Process Control

RF Technology and Process Services
Total Process Control Solution
  • The Hercules® SAPC Server is a stand-alone, easy-to-use Statistical Process Control (SPC) solution. 
  • The Hercules® SAPC Server stores the tool data together with the plasma data and logistical information in a file based process data base.

RF Technology