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APPLICATION GUIDE APPLICATION DATA BASE SENSOR CATALOG DOWNLOAD
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NEW: LARGE AREA UNIFORMITY SIMULATION for a-Si LAYER THICKNESS, please see Large Area Uniformity Simulation
 
PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Photovoltaics Plasma Process Sensor
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Uniformity Improvement
Large Area Uniformity Simulation
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2010 © Plasmetrex GmbH

PLASMA  METROLOGY and PROCESS SERVICES

Plasma Monitoring System Hercules

Pre-process

Fast Conditioning

Chamber Fault

Chamber Matching

Quality Managent

Process Stability

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Hercules® Product Guide
Sensor heads for different tools
Data analyse with HercViewer or HercLotViewer
Data Coupling with FAB host
Data Management by Hercules® Master
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Sensor installation and base lining at least one wet clean cycle

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Easy decision making, fast response to process faults,
saving tool up-time, test wafers, and spare parts

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In case of tricky issues please use
the Plasmetrex process services around all plasma problems
including training of your employees.