
APPLICATION DATA BASE
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2008 © plasmetrex GmbH
INTRODUCTION
This database contains examples from deposition and etching, new applications are publish regularly.
The following abbreviations are used:
AMAT = APPLIED MATERIALS® INC.
LAM = LAM® RESEARCH CORP.
TEL = TELTM TOKYO ELECTRON LTD.
Please note the disclaimer and let us know if you miss a topic.
In case of any questions please contact the PLASMETREX Service Team via phone
+49 30 63 92 50 44.






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