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APPLICATION GUIDE

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APPLICATION GUIDE

Process Fault - What Now?

Fault Patterns

Conditioning

One Product

One Chamber

All Chambers

Conditioning Guide

Chamber Matching

FAQs

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EVENT CALENDAR

Next Event

Last Event

Semicon Korea
February 7 - 9, 2012, COEX, Seoul, Korea
Please visit our distributor
Interage Co. Ltd. Korea
http://www.semiconkorea.org/en/

12th European Advanced Proocess Control and Manufacturing Conference

MINATEC Grenoble, France
April 16 - 18 2012
http://www.apcm-europe.eu

Dr. Michael Klick "Plasmatechnik in der Halbleiter- und Mikrosystemtechnik"

Lecture at Ruhr-University Bochum

18 to 22 July 2011

ISMI Manufacturing Week

Austin, Texas 78719, USA
October 17 - 21, 2011

ISMI Manufacturing Week

Semicon Japan
December 7 -9, 2011, Makuhari Messe
Please visit our distributor
azbil Yamatake Corporation
http://www.semiconjapan.org/en/

If you would like to arrange a meeting at a exhibition or conference
with an Plasmetrex representative please let us know.

We look forward to meeting you soon!

First Wafer Effect

Parameter Change

Particle

First Wafer Effect

Product Mix

Dry Clean

Re-condition after Wet Clean

Pre-process

Process Mix

Chamber Hardware

Chamber-specific Recipe

Conditioning

Media Fault

Tool Software

Pre-process

First Wafer Effect

Examples

Short guide: Chamber Matching

Short guide: Chamber Conditioning

First Wafer Effect

Examples

Short guide: Chamber Matching

Short guide: Chamber Conditioning

Chamber Comparison

New Chamber

Measures for Chamber Matching