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APPLICATION GUIDE APPLICATION DATA BASE SENSOR CATALOG DOWNLOAD
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10th European Advanced Equipment Control / Advanced Process Control (AEC/APC) Conference, Hotel Sheraton Catania, Sicily - Italy, April 28-30, 2010
 
PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Photovoltaics Plasma Process Sensor
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Uniformity Improvement
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2010 © Plasmetrex GmbH

COMPANY

 

The ASI Advanced Semiconductor Instruments GmbH were taken over by the Plasmetrex GmbH per October 1st 2006.

Business segments

  • Plasma metrology equipment for etch and deposition in semiconductor manufacturing – High-end plasma metrology
  • Photovoltaic and display manufacturing – Large chamber plasma control
  • Surface treatment – Low cost plasma control

Service and consulting

  • Qualification of process and maintenance personnel
    • 'Plasma School for Semiconductor Manufacturing'
    • 'Radio Frequency Technology for Plasma Applications'
  • Process, equipment, and metrology consulting
 Business Segments