Courses:

• Plasma School for Semiconductor Manufacturing
• Module: Plasma Physics Fundamentals
• Module: Equipment
• Plasma Etch Tools
• Plasma Deposition Tools
• Module: Process Fundamentals
• Module: Process and Equipment Interaction
• Conditioning and Chamber Matching
• Wafer Damaging, E-chuck, and Arcing
• Plasma Nitridation of ultra thin SiO₂ Films
• Plasma Technology in Solar Cell Manufacturing
• Module: Plasma Physics Fundamentals
• Module: Equipment: Plasma Deposition Tools
• Module: PECVD of Amorphous and Microcrystalline Silicon Thin Films
• Radio Frequency Technology for Plasma Applications

The Plasmetrex Plasma Service Concept

Audience: 

• Process, maintenance, or equipment engineers (plasma etching, PECVD, sputtering)

Target: 

• Basic knowledge of plasma processing and RF technology for every day usage in semiconductor manufacturing

Two Course Lectures:

• Quality, knowlegde, and experience of lectures is at least as important as the quality of the training manual.

Features:

• Comprehensive training manual
• Certificate
• Short final test 
• Course evaluation