PRODUCT GUIDE

Hercules^® at a Glance

Semiconductor Plasma Process Sensor

Photovoltaics Plasma Process Sensor

Total Process Control Solution

PLASMA PROCESS CONTROL

Plasma Control Concept

Plasma Metrology

Data Handling

EXPERIENCE & TRAINING

Training Concept

Plasma School

RF TECHNOLOGY and PROCESS SERVICES

RF Chamber Matching

Uniformity Improvement

Large Area Uniformity Simulation

REFERENCES

Tool and Process

Hercules^® Customers

Experience & Training

Partners

FAQs

CONTACT

Plasmetrex GmbH
Schwarzschildstr. 3
D - 12489 Berlin

phone: +49 30 63 92 50 40
fax: +49 30 63 92 50 41
E-mail addresses: first name.family name@plasmetrex.com

Headquarters
Management

Dr. Michael Klick CEO phone: +49 30 63 92 50 43	Sonja Mendrina Authorized Officer / Prokuristin phone: +49 30 63 92 50 40

Services Team

Dr. Ralf Rothe Support and Application phone: +49 30 63 92 50 44	Lutz Eichhorn Support and Application phone: +49 30 63 92 50 44

	Dirk Suchland Software Development phone: +49 30 63 92 50 42

Detlef Mendrina Buyer phone: +49 30 63 92 50 40	Dr. Marita Kammeyer Education & Training phone: +49 30 63 92 50 45

Sales Offices and Distributors
USA & CANADA

	Tom Reckholder mobile: + 1 408 656 47 95
KOREA
	INTERAGE Co. Ltd, Korea phone: +82 2 400 64 42 fax: +82 2 400 64 42
JAPAN
	azbil Yamatake Corporation phone: +81 466 52 70 34 fax: + +81 466 20 2334
TAIWAN, R.O.C.
	NFORT Technology Corporation phone: +886 3 5538 990 fax: +886 3 5538 486
SINGAPORE & MALAYSIA
	WKK Wong's Kong King (Singapore) PTE Ltd. phone: +65 6741 73 22 fax: +65 6741 63 22
OTHER COUNTRIES
	Please contact the headquarters! phone +49 30 63 92 50 40 fax: +49 30 63 92 50 41