- AVS 55th
International Symposium & Exhibition,
Boston, USA
October 19 - 24, 2008
Tuesday Afternoon Poster Sessions
PS-TuP18: "A reduced model for etch rate prediction based on plasma parameters",
M.Klick, L. Eichhorn, R. Rothe
www2.avs.org/symposium/
- 9th
European Advanced Equipment Control/
Advanced Process
Control (AEC/APC) Conference,
Hotel David Intercontinental,
Tel-Aviv, Israel,
March 31 - April 2, 2008
www.aecapc-europe.com
Please visit
us on our booth.
- User Group Meeting
during 8th
European Advanced Equipment Control / Advanced Process Control (AEC /
APC) Conference
www.aecapc-europa.com
Hotel Hilton Salon Europa, Dresden, Germany
April 18th 2007, 2:30 PM to 5:00 PM
Dr. Michael Klick (Plasmetrex GmbH):
Plasmetrex GmbH - The technical Hercules® Roadmap
Dennis Foeh
(Micronas GmbH):
Usage of Hercules inside commercial FDC System Maestria
Russell Benson (Micron Technology,
Inc), Lutz Eichhorn (Plasmetrex GmbH):
Hercules APC xM - Tool for Technology Improvement and Fault Detection @
Micron`s etch chambers
Prof. Dr. Ralf-Peter Brinkmann
(Ruhr-University Bochum):
Simulation of the SEERS Diagnostic Method: New Analysis and New Results
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