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APPLICATION GUIDE

APPLICATION DATA BASE

A happy Christmas and a successful and properous New Year!

ETCH & DEPOSITION
PROCESS

Hercules^® Product Guide

Plasma Process

Plasma Metrology

Data Handling

NEW Statistical Process Control

Process Improvement

EXPERIENCE & TRAINING

Training Concept

Plasma School

RF Technology

Advanced Courses

Course Informations

Consulting

REFERENCES

Tool and Process

Hercules^® Customers

Experience & Training

Partners

2008 © Plasmetrex GmbH

PLASMA PROCESS METROLOGY for HIGH VOLUME PRODUCTION

Hercules^® Product Serie	Data Bases for Support	Experience & Training

Hercules^® PMX Smart Sensor for Process Development	Application Guide	Plasma School

Hercules^® C Robust Sensor for Manufacturing Control	Application Data Base	RF Technology

Hercules^® N Sensor for Medium Pressure - 13.56 MHz	Sensor Catalog	Consulting & Seminars

Hercules^® at a Glance

Hercules^® PMX

Hercules^® C

Hercules^® N

Process Control

Plasma Key Parameters

Hercules^® Product

Hercules^® Principle

Hercules^® Sensors

Main Applications

Hercules^® Rent-to-buy

Hercules^® Road Map and History

Data Analysis by HercViewer or HercLotViewer

Data Coupling

Data Management by Hercules^® Master

Hercules^® APPLICATION GUIDE

Hercules^® APPLICATION DATA BASE

Damaging

Nitridation

Conditioning