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SEMICON Japan, December 3-5, 2008, Makuhari Messe, Chiba, Please visit us on booth #5A-506 YAMATAKE CORPORATION
 
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2008 © Plasmetrex GmbH

PLASMA SCHOOL FOR SEMICONDUTOR MANUFACTURING

This course provides knowledge on plasma principles and capability of semiconductor manufacturing technologies.

The course includes:

Plasma Physics Fundamentals

PART I: Plasma Physics Fundamentals

  • Elementary plasma physics
  • DC discharge
  • RF discharge
  • CCP - Capacitively Coupled Plasma
  • ICP / TCP - Inductively Coupled Plasma
  • Electron Cyclotron Resonance
  • NLD - Neutral Loop Discharge
  • Remote and pulsed plasmas
  • RF power in plasma
  • Plasma process control in Fab
  • Methods of plasma diagnostics

Example of Contents:

Debye length and chamber design



Videos

  • Space charge sheath (dark space): Formation and structures
  • Effect of parameter variation in plasmas:
  • RF power and pressure
  • Particle transport and removal


Experiment

  • Plasma and magnetic field (video alternatively)

Live plasma experiment 

shows interaction with a static magnetic field by rotation of the plasma (Faraday effect).

Plasma live experiment

Same principle as used in MERIE chambers as TEL™ DRM and Applied Materials® - MxP family.

Plasma Etch Tools





or optional

PART II: Plasma Etch Tools

  • The plasma process, reactor types
  • Capacitively Coupled Plasma
  • MERIE reactors
  • Dual frequency reactors
  • Inductively Coupled Plasma ( ICP/TCP®)
  • Comparison of chamber types
  • Etch chemistry
Plasma Deposition Tools

PART III: Plasma Deposition Tools

  • Sputtering cleaning
  • Sputter deposition
  • Plasma Enhanced Vapor Deposition
  • Nitridation (summary)
Plasma Processes
 

PART IV: Plasma Processes and Characterizations

  • Basics of plasma processing
  • Limitations of plasma processes
  • Gas heating
  • Special ascepts of plasma etching
  • Special ascepts of PECVD
  • Special ascepts of Sputtering
  • Electron charging / shading
  • Conditioning
  • Chamber design
  • Arcing and particles
  • Preprocess
  • Cost control by quality and process management