PRODUCT GUIDE

Hercules^® at a Glance

Semiconductor Plasma Process Sensor

Photovoltaics Plasma Process Sensor

Total Process Control Solution

PLASMA PROCESS CONTROL

Plasma Control Concept

Plasma Metrology

Data Handling

EXPERIENCE & TRAINING

Training Concept

Plasma School

RF TECHNOLOGY and PROCESS SERVICES

RF Chamber Matching

Spare Part Management

Uniformity Improvement

Large Area Uniformity Simulation

REFERENCES

Tool and Process

Hercules^® Customers

Experience & Training

Partners

FAQs

2011 (c) Plasmetrex GmbH

PLASMA TECHNOLOGY IN SOLAR CELL MANUFACTURING

This course provides knowledge on plasma principles and capability of photovoltaic manufacturing technologies.

Location: Courses at the Customer Site

The course includes:

MODULE: PLASMA PHYSICS FUNDAMENTALS
	Elementary plasma physics DC discharge RF discharge CCP - Capacitively Coupled Plasma Overview: ICP / TCP^® - Inductively Coupled Plasma RF power in plasma Uniformity issuses in large area plasmas Plasma process control in Fab Methods of plasma diagnostics
MODULE: EQUIPMENT
	Plasma Deposition Tools Sputter deposition Plasma Enhanced Vapor Deposition Cleaning procedure with NF₃ Cost control by quality and process management
MODULE: PECVD of Amorphous and Microcrystalline Silicon Thin Films*
	Elementary Processes in Silane/Hydrogen Plasmas Fundamentals of Plasma-Surface Interactions Film Growth Control Plasma Diagnostics and Monotoring of SiH₄ / H₂ Outlook: Future Concepts
	* This module is developed in cooperation with PVcomB.