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NEW: LARGE AREA UNIFORMITY SIMULATION for a-Si LAYER THICKNESS, please see Large Area Uniformity Simulation
 
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Hercules® at a Glance
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HERCULES® AT A GLANCE


Hercules® Products and Applications

DRAM

CPU

Manufacturing

Logic

Embedded

Manufacturing

Photovoltaic

Flat Panel

Manufacturing

Etch
(low pressure)1

 Hercules® C 1000 Hercules® PMX 1000  

PECVD / HDP
(low pressure)1

 Hercules® C 500 Hercules® C 500 Hercules® C 500

PECVD
(high pressure)2

 Hercules® N 250 Hercules® N 250 Hercules® N 60

R & D
Etch and deposition

 Hercules® PMX 1000 Hercules® PMX 500 Hercules® N 250

1 up to 35 Pa (250 mTorr)
2 60 Pa - 1 kPa (430 mTorr - 7.5 Torr)

Hercules PMX
Hercules C
 Hercules N500
Hercules C
Hercules® PMX 500 / 1000 Hercules® C 500 / 1000
Hercules® N 250
 Hercules® N 60

Please click here for Data Integration!
Subject to technical alternations!