PRODUCT GUIDE

Hercules^® at a Glance

Semiconductor Plasma Process Sensor

Photovoltaics Plasma Process Sensor

Total Process Control Solution

PLASMA PROCESS CONTROL

Plasma Control Concept

Plasma Metrology

Data Handling

EXPERIENCE & TRAINING

Training Concept

Plasma School

RF TECHNOLOGY and PROCESS SERVICES

RF Chamber Matching

Spare Part Management

Uniformity Improvement

Large Area Uniformity Simulation

REFERENCES

Tool and Process

Hercules^® Customers

Experience & Training

Partners

FAQs

Impressum

Event Calendar

Company

2011 (c) Plasmetrex GmbH

RADIO FREQUENCY TECHNOLOGY FOR PLASMA APPLICATIONS

This course provides knowledge of RF principles and the ability to plasma processes.

Location: Courses at the Customer Site

10 - 20 participants
Courses on demand
Technican and engineer courses

Location: Courses in Berlin

Radio Frequency Technology for Plasma Applications
Spring 2012, Berlin-Adlershof

Duration:

Radio Frequency for Plasma Applications: 8 hours

The course includes:

	Contents:		Examples of Contents:
	1. AC Theory Basic electric values Ohmic resistance Imaginary unit Impedance, inductance, and capacitance Fundamental laws Voltage driver Low and high pass RF power transmission 2. Coaxial Cable Theory Ideal cables Termination Real cables, examples, key parameters Signal delaySkin effect 3. RF - Contacts and Connectors Contact resistance Connector geometries Common adapters and plugs 4. Matching Principles and Types Maximum power into load - DC, RF Impedance matching Matching types Real matchboxes and loads Resonance, LC Oscillation circuit Practical matching equations Fixed matching Examples VHF Matching 5. Real Complete System Equivalent circuit of the RF plasma E-Chuck and equipment circuit Power transmission and losses 6. RF Metrology Accuracy of measurement Voltage and current Directional coupler VI-probe 7. Additional Power Coupling Methods Inductive coupling Generation of RF-oscillations Electro-magnetic waves Microwaves, ECR 8. Waves and Reflections Wave propagation Reflection Standing waves Grounding, shielding, EMC


			Experiments: Capacitors of high RF power Wave propagation in cables Damping and RF power loss in cables Cables and connectors for plasma equipments High voltage RF probes RF current probes

RADIO FREQUENCY TECHNOLOGY FOR PLASMA APPLICATIONS

Location: Courses at the Customer Site

Location: Courses in Berlin

Duration:

Contents:

Examples of Contents:

1. AC Theory

2. Coaxial Cable Theory

3. RF - Contacts and Connectors

4. Matching Principles and Types

5. Real Complete System

6. RF Metrology

7. Additional Power Coupling Methods

8. Waves and Reflections

Experiments: