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2008 © Plasmetrex GmbH

RADIO FREQUENCY TECHNOLOGY FOR PLASMA APPLICATIONS

The course provides a knowledge of RF principles and the ability to plasma processes.

The course includes:

Radio Frequency Technology


Contents:

Examples of Contents:

1. AC Theory

  • Basic electric value
  • Imaginary unit
  • Fundamental laws
  • Voltage driver
  • Ideal and real cables
  • Signal delay

2. RF - Contacts and Connectors

  • RF plasma generation
  • Contact resistance
  • Common adapters and plugs
  • Maximum power load - DC, RF
  • Impedance matching
  • Matching types
  • Resonance, LC oscillation circuit

3. RF Metrology

  • Accuracy of measurement
  • Voltage and current
  • Directional coupler
  • VI-probe

4. Additional Power Coupling
    Methods

  • Inductive coupling
  • Generation of RF-oscillations
  • Electro-magnetic waves
  • Microwaves, ECR

5. Waves and Reflection

  • Wave propagation and reflection
  • Standing waves
  • Grounding, shielding, EMC

Skin effect
Measurement


Experiments:

  • Capacitors of high RF power
  • Wave propagation in cables
  • Damping and RF power loss in cables
  • Cables and connectors for plasma equipments
  • High voltage RF probes
  • RF current probes