This course provides knowledge on plasma principles and capability of photovoltaic manufacturing technologies.

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Location: Courses at the Customer Site 

• 10 - 20 participants
• Courses on demand
• Technican and engineer courses

Please contact us

Location: Courses in Berlin

• Plasma Technology in Solar Cell Manufacturing
  
  

Duration:

• Plasma Technology in Solar Cell Manufacturing 
• Plasma Physics Fundamentals: 6 hours
• Plasma Deposition Tools: 2 hours
• PECVD of Amorphous and Microcrystalline Silicon Thin Films: 2 hours

MODULE: PLASMA PHYSICS FUNDAMENTALS

• Elementary plasma physics
• DC discharge
• RF discharge
• CCP - Capacitively Coupled Plasma
• Overview: ICP / TCP^® - Inductively Coupled Plasma
• RF power in plasma
• Uniformity issuses in large area plasmas
• Plasma process control in Fab
• Methods of plasma diagnostics

MODULE: EQUIPMENT

Plasma Deposition Tools

• Sputter deposition
• Plasma Enhanced Vapor Deposition
• Cleaning procedure with NF₃
• Cost control by quality and process management

MODULE: PECVD of Amorphous and Microcrystalline Silicon Thin Films*

• Elementary Processes in Silane/Hydrogen Plasmas
• Fundamentals of Plasma-Surface Interactions
• Film Growth Control
• Plasma Diagnostics and Monotoring of SiH₄ / H₂
• Outlook: Future Concepts