Adcanced Courses:

        • Electrostatic chuck ESC
        • Arcing and Charging
        • Conditioning and Chamber Matching
        • Plasma Nitridation of Ultra Thin SiO2 Films
        • Deep Reactive Ion Etching (Main focus: Bosch process)

        Special Courses (chamber related):

        • Applied Materials® DPN
        • Applied Materials® DPS
        • Lam® (Novellus) SPEED®
        • Lam® (Novellus) Sequel®


        The Plasmetrex Plasma Service Concept

        Service and Consulting offered by Plasmetrex


        • Process, maintenance, or equipment engineers (plasma etching, PECVD, sputtering)


        • Basic knowledge of plasma processing and RF technology for every day usage in semiconductor manufacturing

        Two Course Lectures:

        • Quality, knowlegde, and experience of lectures is at least as important as the quality of the training manual.


        •  Comprehensive training manual

        • Certificate

        • Short final test 

        • Course evaluation

        Movies and simulations:

        • Space charge sheath (dark space): Formation and structures

        • Effect of parameter variation in plasmas:

          • RF power
          • pressure
        • Collisionless heating of electron in low-pressure processing
        • Phase angle of bias and source power

        • Particle transport and removal


        • Plasma and magnetic field (video alternatively)

        • Live plasma experiment shows interaction with a static
          magnetic field by rotation of the plasma (Faraday effect).


            Same principle as used in MERIE chambers as

             TEL™ DRM

             Applied Materials® - MxP family.