• PRODUCT GUIDE
    PLASMA PROCESS CONTROL
    EXPERIENCE & TRAINING
    RF TECHNOLOGY and PROCESS SERVICES
    REFERENCES
    OTHER

    PROCESS CONTROL

    Plasmetrex provides support for your complete process control loop from process metrology issues and data analysis to process improvement or problem solution.
    Process Control Strategy
    Etching
    Deposition
    Hercules®
    Key parameters
    analysis
    Process and hardware check
    Pre-process check
    Process control needs real-time data.
    Tool data show the tool properties.
    Plasma properties reflect process properties.